JPS6196347U - - Google Patents

Info

Publication number
JPS6196347U
JPS6196347U JP18204184U JP18204184U JPS6196347U JP S6196347 U JPS6196347 U JP S6196347U JP 18204184 U JP18204184 U JP 18204184U JP 18204184 U JP18204184 U JP 18204184U JP S6196347 U JPS6196347 U JP S6196347U
Authority
JP
Japan
Prior art keywords
pressure
diaphragm
pressure gauges
semiconductor
output voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18204184U
Other languages
English (en)
Japanese (ja)
Other versions
JPH041472Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18204184U priority Critical patent/JPH041472Y2/ja
Publication of JPS6196347U publication Critical patent/JPS6196347U/ja
Application granted granted Critical
Publication of JPH041472Y2 publication Critical patent/JPH041472Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP18204184U 1984-11-30 1984-11-30 Expired JPH041472Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18204184U JPH041472Y2 (en]) 1984-11-30 1984-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18204184U JPH041472Y2 (en]) 1984-11-30 1984-11-30

Publications (2)

Publication Number Publication Date
JPS6196347U true JPS6196347U (en]) 1986-06-20
JPH041472Y2 JPH041472Y2 (en]) 1992-01-20

Family

ID=30739577

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18204184U Expired JPH041472Y2 (en]) 1984-11-30 1984-11-30

Country Status (1)

Country Link
JP (1) JPH041472Y2 (en])

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013205403A (ja) * 2012-03-29 2013-10-07 Toshiba Corp 圧力センサ及びマイクロフォン
JP2015064375A (ja) * 2014-12-04 2015-04-09 株式会社東芝 圧力センサ及びマイクロフォン
JP2017058340A (ja) * 2015-09-18 2017-03-23 Smc株式会社 圧力センサ及びその製造方法
US10067021B2 (en) 2015-09-18 2018-09-04 Smc Corporation Pressure sensor having resistive bodies

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013205403A (ja) * 2012-03-29 2013-10-07 Toshiba Corp 圧力センサ及びマイクロフォン
US9759618B2 (en) 2012-03-29 2017-09-12 Kabushiki Kaisha Toshiba Pressure sensor and microphone
US10082430B2 (en) 2012-03-29 2018-09-25 Kabushiki Kaisha Toshiba Pressure sensor and microphone
JP2015064375A (ja) * 2014-12-04 2015-04-09 株式会社東芝 圧力センサ及びマイクロフォン
JP2017058340A (ja) * 2015-09-18 2017-03-23 Smc株式会社 圧力センサ及びその製造方法
US10048147B2 (en) 2015-09-18 2018-08-14 Smc Corporation Pressure sensor including a thin-film diaphragm provided with plural resistive bodies printed in a straight line and manufacturing method therefor
US10067021B2 (en) 2015-09-18 2018-09-04 Smc Corporation Pressure sensor having resistive bodies

Also Published As

Publication number Publication date
JPH041472Y2 (en]) 1992-01-20

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